1/23/2013	10:23:10 PM	Program exited cleanly
1/23/2013	10:23:14 PM	Helium valve closed
1/23/2013	10:23:14 PM	H2 valve closed
1/23/2013	10:23:14 PM	BCl3 valve closed
1/23/2013	10:23:14 PM	PH3 valve closed
1/23/2013	10:23:14 PM	SiCl4 pre valve closed
1/23/2013	10:23:14 PM	SiCl4 post valve closed
1/23/2013	10:23:14 PM	Main Vac valve closed
1/23/2013	10:23:14 PM	Bypass valve closed
1/23/2013	10:23:14 PM	Bubbler valve closed
1/23/2013	10:23:14 PM	Helium MFC set to  0.000000
1/23/2013	10:23:14 PM	H2 MFC set to  0.000000
1/23/2013	10:23:14 PM	BCl3 MFC set to  0.000000
1/23/2013	10:23:14 PM	PH3 MFC set to  0.000000
1/23/2013	10:23:14 PM	SiCl4 MFC set to  0.000000
1/23/2013	10:23:14 PM	Bypass solenoid MFC set to  760.000000
1/23/2013	10:23:15 PM	Tube furnace set to 0
1/23/2013	10:23:16 PM	Main Vac valve opened
1/23/2013	10:23:18 PM	Tube furnace set to 100
1/23/2013	10:23:23 PM	Tube furnace set to 0
